Srinivas P. Tirumala
2868 Homestead Rd., Santa Clara, CA 95051
Tel: (408) 241 7448
Email: srinivastp@hotmail.com
This page decribes various technical skills in detail. Go back to the Resume for other information
- Skilled in photo & etch techniques: Proximity and projection alignment, positive
resists, wet and dry etching, resist stripping, wafer inspection, CD measurements
- Metrology: OSI Metra, Veeco four point, HP- curve tracer, Alpha Step, CV plotter,
NanoSpec, Semi tool (SCA), Tencor - SurfScan
- Skilled in process simulation with SUPREM 4 (Silvaco)
- Statistical data analysis with RS-1
- Familiar with SPC implementation
- Skilled in materials characterization and failure analysis: Lifetime measurements, SRP,
CV/CT measurements, surface charge analysis, sirtl etch, groove and stain technique, X-ray
diffraction, and SEM